Using Deep Learning for segmentation of localized defects on SiC wafers

📋 Type MA thesis
Status finished
📅 Duration Dec 17, 2018 – Jun 16, 2019
👤 Primary supervisors Mathis Hoffmann Andreas Maier Dr.-Ing. Thomas Wagner (Intego GmbH) Simone Gaffling M.Sc. (Intego GmbH)